MEAGlow Ltd.
$48,907.00 CAD
≈ 8 months of average Canadian pay
- Department
- National Research Council Canada
- Recipient country
- Canada
- Fiscal year
- 2018-2019
- Agreement period
- May 1, 2018 – October 31, 2019
- Reference
- nrc-cnrc:172-2018-2019-Q1-907128
Published purpose
Meaglow Ltd. has successfully deployed a range of gas plasma sources for use in the Semiconductor Industry. These hollow cathode plasma sources have the advantage over past designs of high plasma density and low contamination. This optimization project will investigate the development and implementation of new designs that improve the plasma density of hollow cathode plasma sources under various operating conditions.
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Good value
Local impact
Needs context
Questionable
Success story
Wasteful
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Imported August 3, 2026 from open.canada.ca Grants & Contributions